主旨：國科會徵求115年「先進矽基半導體設備關鍵技術研發專案計畫」，自即日起受理申請至115年2月23日(校內截止收件)。

說明：
一、本專案計畫以製程、封裝、檢測設備為核心，藉由跨領域合作、產學研合作，針對系統現狀提出性能提升之目標，以進行關鍵技術研發，並於設備上應用整合。申請機構及計畫主持人務必先行詳閱本計畫徵求公告(如附件)，申請注意事項擇要說明如下：
(一)本專案計畫公告徵求之主要研究議題包含：1.半導體前段製程設備之關鍵元件、模組或次系統，2.半導體3DIC先進封裝製造測試設備，3.矽基半導體檢測設備。
(二)跨領域合作：需由跨領域學者(例如機械、材料、物理化學、電機控制或資訊軟體等相關領域)組成研究團隊。
(三)產學、學研合作：需與設備廠商、晶片生產公司、封裝測試公司或法人單位合作，由合作單位提供機台進行畫整合與成果驗證，提案時請一併檢附合作企業參與計畫意願書。
二、本專案計畫全面實施線上申請，各類書表請務必至國科會網站（https://www.nstc.gov.tw）進入「學術研發服務網」製作，線上申請時，請選擇「專題類-隨到隨審計畫」；計畫類別請選擇「一般策略專案計畫」，計畫歸屬請選擇「工程處」，研究型別請選擇「整合型計畫」，學門代碼請選擇「E9885半導體設備關鍵技術研發」。
三、申請機構、計畫主持人及共同主持人須符合本會補助專題研究計畫作業要點相關規定，且計畫主持人以申請一件本專案計畫為限。
四、本專案計畫未獲補助案件恕不受理申覆。
五、本案聯絡人：
(一)有關本專案計畫，請洽國科會工程處蔡明倫助理研究員，電話：02-2737-7390，e-mail：tsai@nstc.gov.tw。
(二)有關線上申請系統使用及操作問題，請洽國科會資訊系統服務專線：02-2737-7590、7591、7592，e-mail：misservice@nstc.gov.tw。

Subject: NSTC is soliciting proposals for the "Advanced Silicon-Based Semiconductor Equipment Key Technology R&D Project" in 2026. Applications are open from now until February 23, 2026 (internal deadline is February 23, 2026).

Instructions:
I. This project focuses on process, packaging, and testing equipment. Through interdisciplinary and industry-academia collaboration, it aims to improve the performance of existing systems, develop key technologies, and integrate them into equipment applications. Applicant organizations and project leaders must carefully read this project solicitation announcement (attached). Key application points are summarized below:

(I) The main research topics solicited in this project announcement include: 1. Key components, modules, or subsystems of semiconductor front-end process equipment; 2. Advanced packaging manufacturing and testing equipment for semiconductor 3DIC; 3. Silicon-based semiconductor testing equipment.

(II) Interdisciplinary Collaboration: The research team must consist of scholars from interdisciplinary fields (e.g., mechanical engineering, materials science, physical chemistry, electrical control, or information software). (III) Industry-Academia Collaboration: Collaboration with equipment manufacturers, chip manufacturing companies, packaging and testing companies, or legal entities is required. Collaborating entities should provide equipment for design integration and results verification. Please attach a letter of intent from the collaborating company to participate in the project when submitting your proposal.

II. This project will be entirely implemented through online applications. All forms must be created on the National Science Council website (https://www.nstc.gov.tw) through the "Academic Research and Development Service Network." When applying online, please select "Special Topic - On-Demand Project"; for the project category, please select "General Strategic Project"; for the project affiliation, please select "Engineering Department"; for the research type, please select "Integration Project"; and for the academic discipline code, please select "E9885 Semiconductor Equipment Key Technology Research and Development."

III. The applying organization, project leader, and co-leaders must comply with the relevant regulations of the NSTC Subsidized Special Topic Research Project Operation Guidelines. Each project leader is limited to applying for only one project under this program.

IV. Applications for projects that have not received funding will not be accepted.

V. Contact Persons for this Project:

(I) For inquiries regarding this project, please contact Assistant Researcher Tsai Ming-Lun, Engineering Department, NSTC, Tel: 02-2737-7390, e-mail: tsai@nstc.gov.tw.

(II) For questions regarding the use and operation of the online application system, please contact the NSTC Information System Service Hotline: 02-2737-7590, 7591, 7592, e-mail: misservice@nstc.gov.tw.